Electron dynamics in planar radio frequency magnetron plasmas:I. The mechanism of Hall heating and the ?-mode

The electron dynamics and the mechanisms of power absorption in radio-frequency (RF) driven, magnetically enhanced capacitively coupled plasmas (MECCPs) at low pressure are investigated. device focus is a geometrically asymmetric cylindrical magnetron with radially nonuniform magnetic field axial direction an electric radial direction. studied analytically using cold plasma model single-particle formalism, numerically inhouse energy charge conserving particle-in-cell/Monte Carlo collisions code ECCOPIC1S-M. It found that differs significantly from unmagnetized reference discharge. In magnetized region front powered electrode, arises during sheath expansion reversed collapse. Both fields needed to ensure discharge sustaining transport against confining effect field. corresponding azimuthal ExB-drift can accelerate electrons into inelastic range which gives rise new mechanism RF dissipation. related Hall current different nature Ohmic heating, as it has been classified previous literature. heating expected be dominant many discharges. proposed term "{\mu}-mode" separate other modes.